AdvancAir – Custom Clean Room Air Conditioner


AdvancAir® custom environmental control units for cleanrooms put greater capacity and enhanced performance in a smaller footprint. AdvancAir units are built to your exact specification in a variety of system configurations. Our engineering staff will work with you one-on-one to create a full-sized prototype. You can then inspect and test the solution under contract load conditions simulated in our environmental chambers. Small scale or full-run production capabilities are available.

ECU Semiconductor ApplicationAdvancAir Custom Clean Room Air Conditioner technical capabilities

  • Temperature control as tight as plus or minus 0.01 ºC
  • Humidification control capable to plus or minus 0.5% RH
  • Sophisticated process and static pressure controls
  • Chilled water or DX-based systems
  • Computer managed system-wide control for total environmental process, capable of integration into facility control system
  • Vertical or horizontal configurations
  • Meet Semi S2-93 and S8-05 standards
  • Non out-gassing construction available

Examples of AdvancAir applications installed around the world

  • Semiconductor (lithography, CMP, wafer processing)
  • Microelectronic
  • Aerospace (satellite and space craft development)
  • Compact disc production
  • Ultra-clean assembly and metrology operations

 Download AdvancAir datasheet

Just Ask Our Clients

"I'm really impressed with the how the unit is responding to the test parameters, and the recovery times are exceptionally impressive. Your attention to detail and expertise is very evident with how the PECS is performing during this final test phase."

Ed Duben - Mission Management, United Launch Alliance


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